| 摘要 |
A physical quantity sensor includes: a movable body displaceable in a direction of a first axis; a fixed electrode portion disposed to face a movable electrode portion; a spring portion as a connection member connecting a fixed portion with the movable body and including a first extending portion extending from the fixed portion along a second axis crossing the direction of the first axis, a turn-around portion connected to the first extending portion, and a second extending portion extending from the turn-around portion along the second axis; and a wall portion extending from the fixed portion and disposed, in plan view, outside the first extending portion and the turn-around portion of the spring portion. The spring portion and the wall portion are electrically connected. |
