Verfahren zur Vermeidung von Ablagerungen von Verunreinigungsteilchen auf die Oberfläche eines Mikrobauteils, Aufbewahrungsvorrichtung für ein Mikrobauteil und Vorrichtung zur Abscheidung von dünnen Schichten

摘要

Preventing the deposition of polarized particles (7) from a contaminant source (5) on the surface of a microcomponent in a vacuum chamber (3) comprises spraying a beam (8) of oppositely polarized particles between the contaminant source and the microcomponent to entrain the contaminant particles away from the microcomponent to a collector (10). Independent claims are also included for the following: (1) a storage device comprising a vacuum chamber containing a microcomponent and, for carrying out the above process, a source emitting the beam of oppositely polarized particles parallel to and close to the surface of the microcomponent; and (2) a thin layer coating device comprising a vacuum chamber containing a microcomponent substrate (2) and a device for spraying a stream of material (6) for forming a thin layer on the surface of the microcomponent and, for carrying out the above process, a source emitting the beam of oppositely polarized particles in the direction of the stream of material so as to entrain the contaminant particles in the stream away from the microcomponent.