| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method which enables a nozzle plate excellent in ejection performance and durability to be manufactured by enhancing workability in the working of a nozzle. SOLUTION: This manufacturing method comprises: a step of applying a water-repellent agent to one side 51a of a flat plate-like substrate 51, so as to heat-treat it and form a water-repellent film 52; a step of fixing a reinforcing member 55 with a hole part 56, formed in such a manner as to correspond to a position of the nozzle 11a, to the other surface 51b of the substrate 51 by means of an adhesive 57; a step of irradiating the other surface 51b of the substrate 51 with laser from the side of the hole part 56, so as to drill the nozzle 11a into the substrate 51 with the film 52; and a step of performing re-heating at a heat treatment temperature T2 of the film 52 after the nozzle 11a is drilled. The above problem is solved by selecting the adhesive 57 and the film 52 wherein the heat treatment temperature T2 of the re-heating is lower than a decomposition temperature T1 of the adhesive 57. COPYRIGHT: (C)2005,JPO&NCIPI
|
