| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser interferometer that permits size reduction of optical elements while reducing noise light components.SOLUTION: In a laser interferometer, a light source unit 12 emits laser beams that permit interference. A first splitter 14 splits the laser beams into a first component and a second component. A second splitter 20 splits the first component into a main polarized beam component and a noise beam component. A third splitter 18 causes the second component and the main polarized beam component reflected by a measuring face 22 to interfere with each other. A light receiving unit 124 receives the second component under interference by the third splitter 18 and the main polarized beam component. The noise beam component of the first component is not brought to incidence on the third splitter 18.SELECTED DRAWING: Figure 1 |
