发明名称 |
HIGH-FREQUENCY MATCHING REGULATOR |
摘要 |
<p>Provided is a high-frequency matching regulator wherein a matching regulating circuit for regulating matching of a high-frequency generating device and a load device is formed to improve reliability of the high-frequency matching regulator. The regulator is provided with a case, an electric component of the matching regulating circuit, and a wiring material connected to a terminal of the electric component. The electric component is permitted to float from the case by the wiring material.</p> |
申请公布号 |
WO2008084660(A1) |
申请公布日期 |
2008.07.17 |
申请号 |
WO2007JP74696 |
申请日期 |
2007.12.21 |
申请人 |
TOKYO INSTITUTE OF TECHNOLOGY;OKINO, AKITOSHI;MIYAHARA, HIDEKAZU;KAGEYASU, TAICHI |
发明人 |
OKINO, AKITOSHI;MIYAHARA, HIDEKAZU;KAGEYASU, TAICHI |
分类号 |
H03H7/38;H05H1/30;H05H1/46 |
主分类号 |
H03H7/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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