| 摘要 |
<p>PURPOSE: A thin film device, and a manufacturing method thereof, and an electronic device are provided to improve reliability by preventing foreign materials from being mixed with the thin film device. CONSTITUTION: A separating layer(11) is formed on one side of a substrate(10). The substrate is composed of a quartz glass and a soda glass. A support layer(12) used as a support of the thin film device is formed on the separating layer. The support layer is made of the clay as a main component. A protective layer(13) is formed on the substrate to cover the support layer. The protective layer is composed of the inorganic film such as a silicon oxynitride film and an oxide aluminum film. A thin film circuit(14) is formed on the support layer and the protective layer. An electrophoresis sheet(16) is formed on the thin film circuit.</p> |
