发明名称 BIASED, TRIPLE-WELL FULLY DEPLETED SOI STRUCTURE, AND VARIOUS METHODS OF MAKING AND OPERATING SAME
摘要 In one example, a method of forming a transistor above a silicon-on-insulator substrate comprised of a bulk substrate, a buried oxide layer and an active layer, the bulk substrate being doped with a first type of dopant material is disclosed. The method comprises performing a first ion implant process using a dopant material that is of a type opposite the first type of dopant material to form a first well region within the bulk substrate, performing a second ion implant process using a dopant material that is the same type as the first type of dopant material to form a second well region in the bulk substrate within the first well, the transistor being formed in the active layer above the second well, forming a conductive contact to the first well and forming a conductive contact to the second well.
申请公布号 KR100939094(B1) 申请公布日期 2010.01.28
申请号 KR20047014856 申请日期 2002.12.17
申请人 发明人
分类号 H01L29/786;H01L23/58 主分类号 H01L29/786
代理机构 代理人
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