| 发明名称 |
SYSTEM FOR DISCHARGING AN AREA THAT IS SCANNED BY AN ELECTRON BEAM |
| 摘要 |
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object. |
| 申请公布号 |
US2016336146(A1) |
申请公布日期 |
2016.11.17 |
| 申请号 |
US201514710297 |
申请日期 |
2015.05.12 |
| 申请人 |
APPLIED MATERIALS ISRAEL LTD. |
发明人 |
GOLDENSHTEIN Alex |
| 分类号 |
H01J37/22;H01J37/28 |
主分类号 |
H01J37/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system for imaging an object, the system comprises:
electron optics that is configured to scan a first area of the object with at least one electron beam; wherein the electron optics comprises a first electrode; and light optics that is configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object. |
| 地址 |
Rehovot IL |
