| 摘要 |
<p>As shown in FIG. 1, a suction device 13 which vacuum-sucks a workpiece W is connected to an attaching/detaching flow path 14. Negative pressure air in a vacuum supply source 11 is supplied to the attaching/detaching flow path 14 via a vacuum supply control valve 15. The vacuum supply control valve 15 is switched to a vacuum-hold position where the negative pressure air is supplied to the attaching/detaching flow path 14 and a rest position where the supply is stopped. A flow rate sensor 29 which detects flow of the air in the attaching/detaching flow path 14 is connected to the attaching/detaching flow path 14. When a detected value of the flow rate sensor 29 is equal to or less than a predetermined judgment value, it is judged that the workpiece W has been vacuum-held.</p> |
