AN INTEGRATED THREE-DIMENSIONAL MAGNETIC FIELD SENSOR AND A MANUFACTURING METHOD THEREOF

摘要

An integrated three-dimensional magnetic field sensor and a manufacturing method thereof comprise fabricating three single-dimensional magnetic field sensors by using a method of manufacturing film and photolithography, arranging the three single-dimensional magnetic field sensors on three adjacent faces of a cube (9) of non-magnetic material respectively, and adjacent planes of two single-dimensional magnetic field sensors perpendicular to each other. The magnetic multilayer film of the single-dimensional magnetic field sensor includes an anti-ferromagnetic layer (31), a pinned layer (32), a non-magnetic layer (33) and a free layer (34) in turn, a top electrode (4) and a closed superconducting loop are mounted on the free layer (34) in turn. The closed superconducting loop has a section with a width of 1~100µm and the length of the section is 10~200µm, the other sections have a width of 1~100mm, the location of the narrow section coincides with the location of the lower magnetic field sensor and the length direction is perpendicular to the magnetization direction of the pinned layer of the magnetic field sensor, and input terminals (Ui) of the three single-dimensional magnetic field sensors are connected in series.