Probe unit for test tools and method of manufacturing the same

摘要

The present invention provides a novel method of manufacturing the probe unit and a tip assemble and disassemble procedure for test tools, which includes a body with a joint portion and a base portion and a probe tip extending from one side of the base portion opposite to the joint portion, where the probe tip and the base portion are integrally made of same material different from the material of the joint portion.

主权项

1. A method of manufacturing probe units for test tools, comprising:
providing a substrate; forming a plurality of recesses with the shape of desired probe tip in said substrate; depositing a first material layer on said substrate and filling up said recesses to form a probe tip in each said recess; depositing a second material layer on said first material layer; and patterning said first material layer and said second material layer into a plurality of probe units, wherein said second material layer forms a joint portion of said probe unit for jointing a test tool, and each said probe unit comprises one said probe tip; pressing a probe arm on said joint portion of one said probe unit; assembling said probe arm and said joint portion of said probe unit; changing the temperature of said substrate to expand said recesses and release said probe tip from said substrate; and pulling out said probe unit with said probe arm.