发明名称 THERMOELECTRIC DEVICE
摘要 A thermoelectric device includes a semiconductor stacked thin film including a SiGe layer and a Si layer in contact with the SiGe layer. The SiGe has a Si:Ge composition ratio by atomic number ratio within a range of 85:15 to 63:37. The stacked thin film has a plurality of stacked structures each having the SiGe layer and the Si layer.
申请公布号 US2016240761(A1) 申请公布日期 2016.08.18
申请号 US201615018024 申请日期 2016.02.08
申请人 TDK CORPORATION 发明人 MAEKAWA Kazuya;ASATANI Takashi
分类号 H01L35/26;H01L35/22 主分类号 H01L35/26
代理机构 代理人
主权项 1. A thermoelectric device comprising: a semiconductor stacked thin film including a SiGe layer and a Si layer in contact with the SiGe layer, wherein the SiGe has a Si:Ge composition ratio by atomic number ratio within a range of 85:15 to 63:37; and the stacked thin film has a plurality of stacked structures each having the SiGe layer and the Si layer.
地址 Tokyo JP