| 摘要 |
PROBLEM TO BE SOLVED: To provide a method that can enhance the yield while maintaining the optical characteristic of a solid-state image pickup device having a shading film.SOLUTION: A method of manufacturing a solid-state image pickup device having a pixel part and a peripheral circuit part comprises: a step of forming a first insulation film on the pixel part and the peripheral circuit part; a step of forming a second insulation film on the first insulation film; and a step of etching the second insulation film of a photoelectric conversion part. The method of manufacturing the solid-state image pickup device further comprises a step of forming a metal film on the etched second insulation film of the photoelectric conversion part and the second insulation film of the peripheral circuit part, and a step of removing the metal film of the peripheral circuit part and forming a shading film from the metal film in the photoelectric conversion part.SELECTED DRAWING: Figure 1 |
