| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle tip position measuring device causing no damage of the nozzle tip, generating no foreign matter contamination, and capable of measuring precisely accurate position information in the micrometer order. SOLUTION: In this device for measuring the tip position of a nozzle provided in a moving means movable relatively in the XYZ triaxial directions mutually orthogonal to the XY plane on a base, the nozzle tip is equipped with a reference area imaging means for photographing an image in a reference area determined beforehand on the base, and a position displacement from the reference position of the nozzle tip is measured by the photographed image when the nozzle tip is moved to the reference position determined beforehand in the reference area. Especially, in the device, movement of the moving means is controlled by position information by the photographed image from the imaging means for imaging the surface of the base, and the reference area imaging means includes an optical path for guiding the image of the reference area to the imaging means. COPYRIGHT: (C)2005,JPO&NCIPI |
