发明名称 NONVOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
摘要 A nonvolatile memory device and a method of fabricating the same is provided to prevent charges stored in a charge trap layer from moving to neighboring memory cells. The method of fabricating a nonvolatile memory device, includes forming a first dielectric layer on a semiconductor substrate in which active regions are defined by isolation layers, forming a charge trap layer on the first dielectric layer, removing the first dielectric layer and the charge trap layer over the isolation layers, forming a second dielectric layer on the isolation layers including the charge trap layer, and forming a conductive layer on the second dielectric layer.
申请公布号 US2008230830(A1) 申请公布日期 2008.09.25
申请号 US20080052914 申请日期 2008.03.21
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM SE JUN;CHOI EUN SEOK;PARK KYOUNG HWAN;YOO HYUN SEUNG;LEE MYUNG SHIK;HONG YOUNG OK;AHN JUNG RYUL;KIM YONG TOP;HWANG KYUNG PIL;WOO WON SIC;PARK JAE YOUNG;LEE KI HONG;PARK KI SEON;JOO MOON SIG
分类号 H01L29/792;H01L21/28;H01L21/762 主分类号 H01L29/792
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