| 摘要 |
A manufacturing method of a vertical non-volatile memory is provided. A first semiconductor layer, a first barrier, a second semiconductor layer, a second barrier and a third semiconductor layer are formed on a substrate sequentially. The first and the third semiconductor layers have a first conductive state, while the second semiconductor layer has a second conductive state. Several strips of active stacked structures are formed by removing portions of the first, second and third semiconductor layers, and portions of the first and second barrier on the substrate. After forming a storage structure on the substrate, the storage structure is covered with a conductive layer filling spaces among the active stacked structures. A portion of the conductive layer is removed to form word lines across the active stacked structures.
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