发明名称 |
COMPACT PRESSURE-SENSING DEVICE |
摘要 |
The invention is a compact sensing device that is capable of measuring the conditions (e,g, pressure, temperature) inside a cylinder of an internal combustion engine. The invention is also a cost-effective method of fabricating the sensing device. The sensing device includes a substrate, a beam, and piezo-resistive sensing elements. The beam, which is formed on the substrate, is capable of deflecting according to different pressures applied to different beam surfaces. The piezo-resistive sensing elements are coupled to the beam and detect beam deflection. The piezo-resistive sensing elements generate an electrical signal corresponding to the beam deflection. |
申请公布号 |
WO2006110662(A3) |
申请公布日期 |
2009.04.23 |
申请号 |
WO2006US13332 |
申请日期 |
2006.04.10 |
申请人 |
ANALATOM, INC.;NIBLOCK, TREVOR;NIBLOCK, EDWARD |
发明人 |
NIBLOCK, TREVOR;NIBLOCK, EDWARD |
分类号 |
G01L9/06 |
主分类号 |
G01L9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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