| 摘要 |
This mounting structure for a shaft end is a structure for mounting, in an airtight manner, an end of a hollow ceramic shaft 20, which is integrated with a ceramic plate 12 on which a wafer is placed, to the peripheral edge of a through-hole 104 disposed in a bottom plate 102 of a chamber 100. A ring member 26, which is made of a metal material or a metal-ceramic composite material, is bonded in an airtight manner to an end surface of the hollow ceramic shaft 20 via a metal layer 28. A bolt 32 penetrates through the bottom plate 102 and a metal seal 30 in a state in which the ring member 26 is placed via the metal seal 30 on the peripheral edge of the through-hole 104, and the bolt 32 fastens the ring member 26 to the bottom plate 102. |
