发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR PRODUCING STRUCTURE |
摘要 |
A photosensitive resin composition containing a binder polymer, a photopolymerizable compound, and a photopolymerization initiator, wherein the photopolymerizable compound contains a compound represented by general formula (1), and a compound having one ethylenically unsaturated bond per molecule. (In formula (1), R11 represents a C1-20 alkylene group, a C1-10 cycloalkylene group, or a phenylene group. R12 and R13 each independently represent a hydrogen atom or a methyl group. X11 and X12 each independently represent an oxyalkylene group or polyoxyalkylene group containing at least one or more types selected from a group consisting of an oxyethylene group and an oxypropylene group. The total number of oxypropylene groups and oxyethylene groups contained in X11 and X12 is 12-80.) |
申请公布号 |
WO2016117509(A1) |
申请公布日期 |
2016.07.28 |
申请号 |
WO2016JP51294 |
申请日期 |
2016.01.18 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
MURAMATSU YUKIKO;SAWABE KEN;OOTA EMIKO;OKADE SHOTA;LEE SANGCHUL |
分类号 |
G03F7/027;C08F2/44;G03F7/004;G03F7/029;G03F7/031;G03F7/033;G03F7/40;H05K3/18;H05K3/46 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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