| 发明名称 |
OPTICAL BIOSENSOR DEVICE |
| 摘要 |
The present disclosure relates to an integrated chip having an integrated optical bio-sensor, and an associated method of fabrication. In some embodiments, the integrated optical bio-sensor has a sensing device arranged within a semiconductor substrate. An optical waveguide structure is located over a first side of the semiconductor substrate at a position over the sensing device. A dielectric structure is disposed onto the optical waveguide structure at a position that separates the optical waveguide structure from a sample retention area configured to receive a sample solution. |
| 申请公布号 |
US2016341656(A1) |
申请公布日期 |
2016.11.24 |
| 申请号 |
US201514719991 |
申请日期 |
2015.05.22 |
| 申请人 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
发明人 |
Liu Yi-Shao;Cheng Emerson;Chang Yi-Hsien;Cheng Chun-Ren;Chen Ching-Ray;Kalnitsky Alex;Chang Allen Timothy |
| 分类号 |
G01N21/03;H01L27/146;G01N21/64 |
主分类号 |
G01N21/03 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An integrated chip having an integrated bio-sensor, comprising:
a sensing device disposed within a semiconductor substrate; an optical waveguide structure arranged over a first side of the semiconductor substrate at a position laterally overlying the sensing device; and a dielectric structure disposed onto the optical waveguide structure at a position that separates the optical waveguide structure from a sample retention area configured to receive a sample solution. |
| 地址 |
Hsin-Chu TW |
