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发明名称
摘要
申请公布号
JP3876218(B2)
申请公布日期
2007.01.31
申请号
JP20020355902
申请日期
2002.12.06
申请人
发明人
分类号
H01L21/8242;H01L21/8246;H01L27/105;H01L27/108
主分类号
H01L21/8242
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