发明名称 SEMICONDUCTOR WAFER THINNING
摘要 A method for processing a first semiconductor wafer having a first surface and a second surface, by placing, on the second surface of the first wafer, a second wafer with an interposed resist layer, and thinning down the first surface of the first semiconductor wafer.
申请公布号 US2007218649(A1) 申请公布日期 2007.09.20
申请号 US20070748995 申请日期 2007.05.15
申请人 STMICROELECTRONICS SA 发明人 HERNANDEZ CAROLINE
分类号 H01L21/461;H01L21/46 主分类号 H01L21/461
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