SILICON RESONATOR OF THE TUNING-FORK TYPE

摘要

The invention relates to a silicon resonator (10) of the tuning-fork type in which the linear frequency drift depending on the temperature is compensated. The resonator comprises a silicon base (14), a plurality of parallel arms (11, 12, 13) capable of vibrating and actuation means (18, 21, 22), wherein said arms include a silicon layer provided between two layers of silicon oxide having a thickness, relative to that of the silicon layer, such that it ensures the first-order compensation of the resonator thermal drift.