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发明名称
摘要
申请公布号
JP4118537(B2)
申请公布日期
2008.07.16
申请号
JP20010231119
申请日期
2001.07.31
申请人
发明人
分类号
G02F1/1333;H01L21/306;C09K3/10;H01L21/288;H01L21/304
主分类号
G02F1/1333
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