| 摘要 |
An interferometer and method for interferometric analysis are provided. The methodology includes generating first and second light beams from a light source, interacting the first light beam with an object under inspection, forming, from light emanating from the object under inspection in response to the interacting, an image of the light source on an image sensor, projecting the second light beam on the image on the image sensor, the combination of the light emanating from the object under inspection and the second light beam forming a collective image on the image sensor, applying a Fourier transform to the collective image formed on the image sensor, thereby forming a phase image, and isolating a wavefront map of the object under inspection from within the phase image.
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