发明名称 BREAK DEVICE
摘要 PROBLEM TO BE SOLVED: To break through a protective film without using a protective film pasting removing device when breaking a scribed substrate with a break bar.SOLUTION: The break device includes: a delivery roller 21 for delivering a protective film 23; and a take-up roller 22. The protective film 23 is guided to the take-up roller 22 through a lower end of a break bar 15. The protective film is taken up a little amount for one or a plurality of times of breaks with a motor 24 by rotating the take-up roller 22. Thereby, the protective film can be broken at a new position of the protective film for each break. Therefore, a pasting remove device for pasting and removing a protective film is no longer required.SELECTED DRAWING: Figure 2
申请公布号 JP2016184650(A) 申请公布日期 2016.10.20
申请号 JP20150063781 申请日期 2015.03.26
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 MITANI TAKURO
分类号 H01L21/301;B28D5/00 主分类号 H01L21/301
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