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发明名称
Keramischer Suszeptor
摘要
申请公布号
DE60316746(T2)
申请公布日期
2008.02.07
申请号
DE20036016746T
申请日期
2003.04.15
申请人
SUMITOMO ELECTRIC INDUSTRIES INC.
发明人
KUIBIRA, AKIRA;NATSUHARA, MASUHIRO;NAKATA, HIROHIKO
分类号
H01L21/00;H05B3/20;C23C16/458;C23C16/46;C30B25/12;C30B31/14;H05B3/14;H05B3/26;H05B3/68
主分类号
H01L21/00
代理机构
代理人
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地址
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