| 摘要 |
PROBLEM TO BE SOLVED: To provide a tray for storing a substrate and a method of transporting and storing the substrate which do not require much space for transportation and storage, with which transportation package is reduced in size and cost, which make it difficult for dust or a foreign substance to be attached to the substrate and handle a substrate having a larger or a much larger size. SOLUTION: A substrate tray for placing a substrate within a peripheral frame which is rectangular in plane shape. One pair of facing frame parts includes a folding part for enabling the right and left of the frame to be fold up at the center of the frame parts, and the other pair of facing frame parts includes a plurality of wires or wire ropes for connecting the facing frame part and for placing the substrate thereon. COPYRIGHT: (C)2009,JPO&INPIT |
