| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the reliability of an acceleration sensor device by giving redundancy to detection parts against their mechanical breakage, with the sensor device comprising movable electrodes displaceable as the detection parts used for detecting acceleration. <P>SOLUTION: The detection parts 1-4 used for detecting acceleration as a detecting object, each comprise a movable electrode 20 as a movable part and fixed electrodes 30 and 40 disposed opposite to the movable electrode 20. When acceleration is applied thereto, capacitance changes between the movable electrode 20 and the fixed electrodes 30 and 40, and the capacitance changes is outputted as signals of the detection parts 1-4. The plurality of such detection parts 1-4 are provided on one semiconductor chip 10. Even if one of the detection parts mechanically breaks down, detection can be performed by using the output signals from the other detection parts. <P>COPYRIGHT: (C)2008,JPO&INPIT |
