HETERO-JUNCTION SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a hetero-junction semiconductor device which inhibits the occurrence of chips and cracks and has less on-resistance.SOLUTION: A hetero-junction semiconductor device comprises: a channel layer 10 including a semiconductor; and a barrier layer 12 which is arranged on the channel layer 10 and includes a semiconductor having a band gap larger than that of the channel layer 10. The barrier layer 12 includes: a first barrier layer 12a composed of a semiconductor layer where a crystal structure in contact with the channel layer 10 is uniform; and a second barrier layer 12b having less stress against the channel layer 10 compared with the first barrier layer 12a.SELECTED DRAWING: Figure 1