| 摘要 |
PROBLEM TO BE SOLVED: To provide exposure equipment capable of suppressing a man hour, time, and a mask number required for exposure of a three-dimensional work.SOLUTION: There is provided projection exposure equipment capable of exposing a surface of a three-dimensional work 71 having a surface with any angle with respect to a main beam 120 of illumination light. The projection exposure equipment comprises: exposure mask patterns 16, 18 arranged at a first inclination angle less than a right angle with respect to the main beam 120; and a mirror having reflection surfaces 46b, 47b for reflecting illumination lights 310, 330 which passed the exposure mask patterns 16, 18 toward imaging surfaces 36, 38 on the three-dimensional work 71 at a predetermined inclination angle with respect to the main beam 120.SELECTED DRAWING: Figure 9 |
