发明名称 MEASURING DEVICE HAVING IMPROVED CONVIENCES
摘要 PURPOSE: A measuring device with improved convenience is provided to prevent an object from being shaken in horizontal by forming a groove at the one side of a fixture. CONSTITUTION: In a measuring device with improved convenience, a stage(130) is installed on a table(110). A first panel(140) is installed on the top of the stage, and a second panel(150) comprises a fixing means(154) while being installed on the top of the first panel. A microscope(171) is installed on a bridge(160) fixed on the stage while being installed on the top of the second panel. An object located on the second panel through a microscope is measured. The fixing unit is penetrated through the second panel and is connected to a lift pump(156).
申请公布号 KR100930651(B1) 申请公布日期 2009.12.09
申请号 KR20090055784 申请日期 2009.06.23
申请人 UNITECH PARSONS CO., LTD. 发明人 HAM, DONG II
分类号 H01L21/66 主分类号 H01L21/66
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