| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector that can easily adjust a resonance frequency in which a mirror is resonantly driven with eccentricity of the mirror curbed.SOLUTION: An optical deflector 1 comprises: a frame 2; a mirror 3; a resonance frequency adjustment rib 4; arms 6 to 9; torsion bars 10 to 13; and a drive unit 14. The arms 6 to 9 have one end side anchored to the frame 2, and other end side connected to one end side of the torsion bars 10 to 13. The torsion bars 10 to 13 have other end side connected to the mirror 3. The drive unit 14 resonantly drives the mirror 3. The resonance frequency adjustment rib 4 is formed at a center of a face on an opposite side of the mirror 3. The resonance frequency in which the mirror 3 is resonantly driven is adjusted based on an amount of etching at which the resonance frequency adjustment rib 4 gets etched.SELECTED DRAWING: Figure 1 |
