| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of accurately and easily measuring the revolution periods etc. of a rotor by optically measuring displacements of the rotor of a ball screw or a linear guide. SOLUTION: Ceramic rotor having different reflectivities are inserted in parts of the rotor, and two through holes for measurement are provided for a side wall of a nut. The through holes are formed at a distance from each other by the amount of one and a half turns of a guide groove. A laser beam emitted from the laser Doppler vibrometer detection part toward the two through holes is reflected at the surface of the rotator, and its reflected light is detected by the laser Doppler vibrometer detection part. Since the intensity of reflected light from the ceramic rotor is weaker than that from other parts, it is possible to measure the revolution periods of the rotating body by measuring temporal changes in signal intensity. COPYRIGHT: (C)2005,JPO&NCIPI
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