| 摘要 |
PROBLEM TO BE SOLVED: To provide a vaporizer which is simple in structure and can vaporize a liquid efficiently, and a heat treating furnace using the vaporizer. SOLUTION: Inside a cylindrical vaporizer main body 4 comprising a gas feeding port 1 for feeding a carrier gas to the inside, a liquid feeding port 2 for feeding a liquid to be vaporized to the inside and a gas outlet port 3 for taking out a gas mixture of the vapor obtained by vaporizing the liquid and the carrier gas, an inside cylindrical body 6 is arranged wherein the liquid fed from the liquid feeding port 2 spreads wetly and evaporates on an outer peripheral surface 6a, and the carrier gas fed from the gas feeding port 1 passes through an inner peripheral side.The inside cylindrical body 6 is configured to comprise a flange (collar) part 7 whose outer peripheral part is in contact with the inner peripheral surface 4a of the vaporizer main body 4 and which partitions an area A where the gas is fed from the gas feeding port 1 and an area B where the liquid is fed from the liquid feeding port 2.The inside cylindrical body 6 is configured to comprise, on the outer peripheral surface 6a, a member (porous metal member) 8 for enhancing the contact area with the liquid and the liquid holding capability. COPYRIGHT: (C)2005,JPO&NCIPI
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