发明名称 METHOD FOR THE PLASMA TREATMENT OF A SURFACE
摘要 The invention relates to a method for the plasma treatment of a surface i n a hollow body (4), in which firstly the hollow body (4) which has a wall o f dielectric material is filled with a process gas, after which the hollow b ody (4) is sealed gas-tight and introduced into a space (5) between at least two electrodes (1, 2), with the external pressure prevailing in this space (5) being above 0.5 bar, while an internal pressure likewise of at least 0.5 bar prevails in an inner chamber of the hollow body (4), and the space (5) between the electrodes (1, 2) being filled with a gas which has at the exter nal pressure a higher ignition voltage than the process gas at the internal pressure. Finally, a plasma is ignited in the inner chamber of the hollow bo dy (4) by applying a sufficiently high alternating voltage between the elect rodes (1, 2).
申请公布号 CA2658796(A1) 申请公布日期 2008.02.07
申请号 CA20072658796 申请日期 2007.07.19
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 SCHLITTENHARDT, EUGEN;THOMAS, MICHAEL
分类号 B05D7/22;B05D7/24;C08J7/18;C23C16/04;C23C16/507;H01J37/32 主分类号 B05D7/22
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