| 摘要 |
A metal capacitor and a manufacturing method thereof are provided to improve impedance characteristic by preventing contact resistance between layers. A terminal enhancement mode metal member(11) has a groove forming unit, a first electrode drawing unit and a second electrode drawing unit. A metal oxide layer(12) is formed on the terminal enhancement mode metal member. A plurality of seed electrode layers(13) are formed in the metal oxide layer formed in both sides of the groove forming unit. A plurality of main electrode layers(14) are formed in a plurality of seed electrode layers. The insulating layer(15) is formed on the plurality of main electrode layers and the terminal enhancement mode metal member. The first and second electrodes drawing units of the terminal enhancement mode metal member are exposed to the outside. A plurality of conductive connection layers(16) connect the plurality of main electrode layers. A first lead terminal(21) is selectively connected to the first and second electrode drawing units. A second lead terminal(22) is connected to the main electrode layer. A sealing member(30) seals the terminal enhancement mode metal member hermetically. The first and second lead terminals are exposed to the outside.
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