INJECTION DISTRIBUTION DEVICE

摘要

Embodiments of the present disclosure generally relate to apparatus and methods for controlling injection profile. One embodiment provides an injection distribution device. The injection distribution device includes a shield portion and a baffle portion. The baffle portion comprises a first baffle having a plurality of first openings formed therethrough, and a second baffle having a plurality of second openings formed therethrough. At least a portion of the first baffle overlaps with the second.

主权项

1. An injection distribution device, comprising:
a first baffle having a plurality of first openings; and a second baffle having a plurality of second openings, wherein at least a portion of the second baffle overlap with the first baffle, and the plurality of second openings are arranged so that flow resistance of through the second baffle varies along a length of the second baffle.