| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrafine throttle mechanism which solves a problem of a low yield and difficulty in setting an ultrafine throttle in conventional ultrafine throttle mechanisms.SOLUTION: An ultrafine throttle mechanism 1 comprises: a metallic tube arranged and connected along a flow channel as a part of the flow channel inside a throttle mechanism housing; and ultralow flow rate formation means which squeezes the tube inside the throttle mechanism housing to cause plastic deformation to make the fluid passage cross section a cross section corresponding to fine diameter holes. |
