EPITAXIAL STRUCTURE AND METHOD FOR MAKING THE SAME

摘要

An epitaxial structure and a method for making the same are provided. The epitaxial structure includes a substrate, an epitaxial layer and a carbon nanotube layer. The epitaxial layer is located on the substrate. The carbon nanotube layer is located in the epitaxial layer. The method includes following steps. A substrate having an epitaxial growth surface is provided. A carbon nanotube layer is suspended above the epitaxial growth surface. An epitaxial layer is epitaxially grown from the epitaxial growth surface to enclose the carbon nanotube layer therein.

主权项

1. A method for making an epitaxial structure, the method comprising:
providing a substrate having an epitaxial growth surface; suspending a carbon nanotube layer above the epitaxial growth surface, wherein the carbon nanotube layer is free-standing and spaced from the epitaxial growth surface; applying a voltage between two opposite sides of the carbon nanotube layer so that the carbon nanotube layer produces heat to heat the substrate; and epitaxially growing an epitaxial layer on the epitaxial growth surface.