ULTRASONIC TRANSDUCER

摘要

Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.

主权项

1. An ultrasonic transducer comprising:
a substrate comprising a main cavity, a secondary cavity, and a channel, wherein the main cavity has a greater depth than the secondary cavity, the secondary cavity has a greater depth than channel, a first step is formed at a location where the main cavity and the secondary cavity overlap, and a second step is formed at a location where the secondary cavity and the main cavity overlap; an electromechanically active device attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over a bottom of the main cavity; and a membrane section bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active device such that vibration of the electromechanically active device at ultrasonic frequencies causes the membrane to vibrate at ultrasonic frequencies.