PROCESS AND STRUCTURE FOR FABRICATION OF MEMS DEVICE HAVING ISOLATED EGDE POSTS

摘要

A method of fabricating an array of MEMS devices includes the formation of support structures (98) located at the edge of upper strip electrodes (92). A support structure is etched to form a pair of individual support structures located at the edges of a pair of adjacent electrodes (92). The electrodes themselves may be used as a hard mask during the etching of these support structures. A resultant array of MEMS devices includes support structures having a face (107) located at the edge of an overlying electrode and coincident with the edge of the overlying electrode.