| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting method by which a plate-like work-piece can be held stably on a chuck table even when performing cutting processing while holding the plate-like work-piece on the chuck table without using an annular frame, spraying cutting liquid through a cutting liquid nozzle and removing cutting chips.SOLUTION: In a cutting method using a cutting device 1, protruding parts Td of a dicing tape T to which is not adhered a plate-like work-piece W are inclined to descend toward an outer periphery of a chuck table 3 from a work-piece suctioning surface 32, and the protruding parts Td are suctioned by tape suctioning surfaces 33 of the chuck table 3a, so that cutting liquid which is sprayed through cutting liquid nozzles 63 and 64 can be prevented from entering a gap between the chuck table 3a and the dicing tape T during cutting processing. This can suppress the dicing tape T from being twisted and maintain suctioning force of a holding surface 30 of the chuck table 3, so that the plate-like work-piece W can be stably suctioned and held.SELECTED DRAWING: Figure 7 |
