ACCELERATION SENSOR

摘要

An acceleration sensor according to an embodiment of the present invention includes a mass body, a membrane movably connected to the mass body, a support part which is connected to the membrane and supports and floats the mass body, and a stopper part which is connected to the membrane to face the mass body in order to limit the excess displacement of the mass body. The stopper part includes a first stopper part facing the mass body and a second stopper supporting the first stopper. So, optimal design for a gap between the mass body and the stopper can be realized.