| 摘要 |
Disclosed are a micro-lens and a manufacturing method thereof, capable of manufacturing a circular microfluidic chamber with a flexible parylene thin film, and controlling a focus distance by using the same. The manufacturing method includes: a step of forming a first pattern on a first base substrate, and forming a mold part by forming a first parylene thin film on the first pattern; a step of forming a second pattern by etching a SiN layer on a first surface of a second base substrate, in which the SiN layer is formed on a silicon layer, and partially etching the silicon layer, and forming a support substrate by forming a second parylene thin film on the SiN layer of a second surface of the base substrate; a step of combining the mold part with the support substrate to combine the first parylene thin film with the second parylene thin film; a step of manufacturing the microfluidic chamber by printing the first parylene thin film on the support substrate by removing the mold part; and a step of manufacturing the micro-lens by filling the microfluidic chamber with fluids. The present invention is capable of changing a focus distance by controlling a type of the fluids or pressure, with which the microfluidic chamber is filled. |
