| 摘要 |
PROBLEM TO BE SOLVED: To reduce hysteresis on a displacement-differential pressure characteristic of a diaphragm.SOLUTION: In a pressure receiving part of a diaphragm 251, a film thickness T1 of a contact part 31 contacting with a plate member 254b is made thicker than a film thickness T2 of a non-contact part 32 brought into non-contact with the plate member 254b, and thereby rigidity of the contact part 31 is made higher than rigidity of the non-contact part 32. With this constitution, the curve of the contact part 31 can be suppressed in deformation of the diaphragm 251, and change of the contact area between the diaphragm and the plate member can be suppressed. Consequently, hysteresis on a displacement-differential pressure characteristic of the diaphragm can be suppressed.SELECTED DRAWING: Figure 10(a) |
