Micro electro mechanical system microphone, has microphone membrane and auxiliary membrane, which are electrically coupled so that movement of auxiliary membrane is effected simultaneously during movement of microphone membrane

摘要

The microphone has microphone membrane (M1) and an auxiliary membrane (M2), which are connected with a closed air volume. The membranes are electrically coupled so that a movement of the auxiliary membrane is effected simultaneously during movement of the microphone membrane. A base has two openings (AU1, AU2), which flow into a hollow space (HR2) that is formed within the base.