Imprinting apparatus useful for imprinting pattern from template to subject body, comprises mount, body, support, template, and regulator

摘要

An imprinting apparatus (1) comprises a mount (15) to support a subject body (13), a movable body (19) capable of moving away from and close to the mount, a support swingably attached to the movable body, a template (41) being attached to the support and including an imprinting face, and regulator. The imprinting face is patterned to make an impression on the subject body. The regulator intervenes between the movable body and the support. The regulator includes >=3 actuators (47A-C). The actuators are independently controllably driven to regulate an orientation of the imprinting face. Each of the actuators includes one selected from the group of a piezoelectric element and a magnetostrictive element.