| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize high sensitivity and high accuracy analysis under optimum measurement environmental pressure, regardless of the pressure conditions of a manufacturing process, while preventing cost from increasing by using the minimum amount of equipment, and to improve the analyzer itself in durability. <P>SOLUTION: In a gas analyzing system, a vacuum pump 3 interposed in an evacuation system 2 which sucks and exhausts process gas obtained after the manufacturing process under a reduced pressure, is constituted of two or more stages of roots pumps 3A-3E which are arranged serially in a gas evacuation direction and comparted by partitions 9 of respective compression chambers 6. The gas-analyzing system is constituted up such that a component of the gas is measured by an infrared gas analyzer 4, capable of being selectively connected to any one of exhaust ports of the compression chambers 6 in the two or more stages of roots pumps 3A-3E. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
