| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for accurately forming an optical waveguide and improving the yield of an optical waveguide, in an optical waveguide formed on a substrate. SOLUTION: By the method of manufacturing the optical waveguide formed on the substrate, a lower clad layer is formed on the substrate, a trench having a core pattern form is formed by photolisography and etching, a core film is so formed by filling the trench that the sum of the depth of the trench and the height of the core film on the trench becomes equal to the height of the core, a core pattern is so formed by the photolithography and the etching that the shape of the core film becomes identical with the shape of the trench, and an upper clad is formed. The optical waveguide manufactured by the present method is also provided. COPYRIGHT: (C)2007,JPO&INPIT |
